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On the other hand, there is no moving mechanical part in non-mechanical micro-pumps, which are capable of converting the non-mechanical energy into the mechanical energy. Gidde R.R., Pawar P.M., Ronge B.P., Dhamgaye V.P. These pumps are typically based on thermo-pneumatic, shape memory alloy, or thermally expandable polymer mechanisms [11]. TEL +1 508 983 1434 At the inlet and outlet of the pump, the outlet boundary condition is considered, which results in free movement of water to inside and outside of the channel. Piezoelectric micropumps are beneficial because they're especially well-suited to applications that require high precision, low power, a constant flow rate, and maximum cleanliness or sterility as a transport environment. In this study, the applied frequency to the piezoelectric material is fixed as 50 Hz in all the cases. Piezoelectric micro-pumps offer many applications and could provide considerable flow rates in miniature systems. Accordingly, the corresponding valve should be under the open condition, which allows the fluid to flow towards the main chamber. 24 October 1996; pp. For instance, when the attack angle corresponding to the width of 8 m of the inlet changes from 65 to 60, the flow rate shrinks from 14.0 to 13.7 L/m, which corresponds to 1.8% change in the flow rate compared to a 8.3% change in the attack angle. Since a larger applied voltage leads to a more energy exchange at the interface, larger flow rates are obtained. The designed piezoelectric micropump in this study can be used in many applications such as local medical treatment and drug delivery systems, where the supply of a controlled flow rate is vital. Malvandi A., Ganji D. Magnetohydrodynamic mixed convective flow of Al2O3water nanofluid inside a vertical microtube. From a regular 5 VDC input, it readily generates approximately the 250 Vp-p, 40 Hz necessary for driving the pump. In order to understand the effect of increasing length on the flow rate, the streamlines shown in Figure 6 should be considered. Variation of the obtained flow rate with the applied voltage (Lp) for two valve widths (w); (Lp = 5 mm and hp = 130 m). A built-in magnet enables the pump cartridge to be easily removed from and attached to an actuator with a piezoelectric element.This makes the pump sanitary, since it is possible to exchange the cartridge according to the fluid type, or sterilizing it prior to use. ; formal analysis, A.K., A.A., and V.E.A. National Library of Medicine The drag force due to the velocity and pressure field are considered as external forces in the governing equations related to solid mechanics. Therefore, it can be concluded that when the length of the valve increases, the flow rate increases as well. Note 2: TYGON is a trademark of Saint-Gobain Performance Plastics. [24], the micro-pump efficiency could be increased by embedding two chambers. Valves for Ventilators and transmitted securely. HVC Series Valves, Live Cell Imaging Fluidic System Modify flow rate by adjusting drive voltage or frequency.

The diameter of the piezoelectric layer is smaller than the attached glass. Micro 3D Perfusion Culture System The driving voltage and frequency for operating the piezoelectric micro pump can be arbitrarily set by an external control signal, which enables a flow rate control. Second, the valve might experience overbending as the applied force resulting from the drag forces increases with the attack angle. For instance, magneto hydrodynamic (MHD) micro-pumps involve the flow of electrically conducting fluid under electric and magnetic fields [6]. All authors have read and agreed to the published version of the manuscript. With the application of the electrical potential (V) to the piezoelectric wafer with thickness of (t), the electric field (), expressed as =Vt, makes the wafer shrink in the radial direction with free strain. In this study, in order to determine the sensitivity of the grid size to the obtained results, seven different sizes with a total number of cells ranging from approximately 2 103 to 105 are used. Due to the small magnitude of the velocity in the pump and small dimensions of the design (in the order magnitude of micro-meters), the applied stresses on the valves are relatively small. The site is secure. Received 2020 Jul 13; Accepted 2020 Jul 30. Westborough, MA 01581 U.S.A. Shi H., Zhao Y., Liu Z. The .gov means its official. Additionally, assuming the classical beam theory (linear Euler-Bernoulli) with poling the piezoelectric through the thickness, the governing equations of one-dimensional electro-mechanical coupling are as follows: In these equations, the subscripts 1 and 3 stand for the directions of the length and thickness of the beam. This piezoelectric micro pump is a delivery pump, which uses highly chemically inert materials such as PTFE, PEEK, FFKM, etc. Figure 9a shows the effect of the width of the valve on the flow rate for three different valve lengths (i.e., 120, 130, 140 m). Figure 5b demonstrates the variation of flow rate with respect to the total mesh numbers. The obtained backpressure and flow rate were 35 kPa and 6 mL/min, respectively, for 20 Hz resonant frequency. Fuel cells, consisting of a cathode and anode sandwiching an electrolyte, create electrochemical reactions as fuel and air currents pass across their plates. First, the flow will be blocked at the side, where the flow rate is required. The optimum width of the valve is 4 m for the length of 120 m. Note 3: If the flow rate decreases with the above tubing, please use the larger tubing available. FOIA Thus far, many micro-pump designs have been accomplished with various structures and operating mechanisms [4]. IV pumps often use peristaltic micropumps to administer lifesaving medications, and piezoelectric pumps are one way that they do it.

zbey A., Karimzadehkhouei M., Yaln S.E., Gozuacik D., Koar A. The fabricated pump consisted of a pumping chamber, silicon check valves and a thin glass membrane actuating along with a piezoelectric wafer. The above equations are solved using the FEM (finite element method) and software COMSOL Multiphysics 5.5. Moreover, when the piezoelectric component moves downwards, the situation becomes reverse. T1 is the stress, and S1 is the strain along the length of beam. [26] studied a parallel dynamic micro-pump comprising a valve, electro-magnetic coil and diaphragm. The results show that as the length of the valve increases, larger flow rates could be obtained from the piezoelectric micro-pump. First, the voltage is applied to the piezoelectric material, and the displacement and velocity are calculated. The MPD-200A is a thin, compact, and lightweight driver board. Variation of the obtained flow rate with piezoelectric component length (Lp) for two valve widths (w); (a) (V = 400 V and hp = 130 m); (b) (V = 200 V and hp = 130 m). Nevertheless, when the length of the valve increases, the same event occurs at the other side as well. Guo S., Nakamura T., Fukuda T., Oguro K. Design and experiments of micro pump using ICPF actuator; Proceedings of the MHS96 Seventh International Symposium on Micro Machine and Human Science; Nagoya, Japan. One of the advantages of a piezoelectric micropump is the simplicity of the technology. Another example of a non-mechanical micro-pump is electro-hydrodynamic (EHD) micro-pumps, which induce fluid flow through the action of electrostatic forces on dielectric liquids [9]. Bethesda, MD 20894, Web Policies Wang Y.-N., Fu L.-M. Micropumps and biomedical applicationsA review. G,sands are given as: The other component of the pump is the piezoelectric material. For pumping the working fluid, an alternating voltage should be applied to the piezoelectric material, which results in strain in the material. The mechanical energy at the interface of the piezoelectric wafer results in fluid flow inside the microchannel. They applied a frequency of 100 Hz with a current of 0.3 A and reported a 30-m displacement in diaphragm and 6-L/s maximum flow rate. The model presented in the previous section is validated against the experimental data of the study Zengerle et al. FAX +81 52 891 7386, (d/b/a Takasago Fluidic Systems) The When the piezoelectric component moves upwards, the fluid should be supplied from the left side. Micro-pumps are one of the most frequently used devices, which supply the energy required to drive a fluid through microfluidic passages. The results show that the performance of the pump is relatively low at the lower applied voltages. Here, we simulated the corresponding domain under the abovementioned assumptions. The corresponding flow rates are 11.1 and 5.9 L/min, respectively. ; writing (review and editing), A.K. 255260. The working principle of the piezoelectric micropumps is similar to the reciprocating macro-scale pumps, where both the inlet and outlet are closed during the discharge and suction strokes, respectively. Kurtolu E., Bilgin A., een M., Yldz M., Acar H.F.Y., Koar A. Ferrofluid actuation with varying magnetic fields for micropumping applications. In addition, small size, rapid response, and simple structure are other features of this type of micro-pumps [21]. The MPC-200B is a compact and lightweight controller that can provide the high voltage power output necessary to drive the piezoelectric micro pumps. Guo S., Hata S., Sugumoto K., Fukuda T., Oguro K. A new type of capsule micropump using ICPF actuator; Proceedings of the MHA98 1998 International Symposium on Micromechatronics and Human Science.-Creation of New Industry-(Cat. Lee D.G., Or S.W., Carman G.P. This study parametrically investigates the effects of major parameters, namely the length, width and attack angle of valves, piezoelectric length, and applied voltage. In this article, we'll take a look at all that and more. This pump was able to provide flow rate and back pressure of 8 L/min and 9.8 kPa, respectively, when 125 V voltage and 1 Hz frequency were applied. Accessibility Based on the obtained low maximum stress, the occurrence of failures due to fatigue after a specific cycle is not expected. At the second step, the piezoelectric disc moves downwards with respect to the chamber. Moreover, based on the length, Youngs modulus, and attack angle of the valve, an optimum width can be predicted for the width of the valve. The inverse piezoelectric effect involves the motion of piezoelectric material as a voltage is applied on each end, allowing a diaphragm to contract and expand upon an electrical stimulus. Portable Medium Replacement System. The optimum width of the valve is dependent on the material as well. At 200 V of applied voltage, the optimum attack angles are 60 and 65, for the widths of 6 and 8 m, respectively. In other words, to achieve considerable flow rates, a relatively high voltage should be applied to the piezoelectric component. This research received no external funding. Moreover, when the width is changed to 8 m, the optimum angle becomes 65, which results in a flowrate of 14.0 L/min. Furthermore, the excited piezoelectric actuators have a large actuation force [20]. Valve-less piezoelectric micropumps were studied experimentally and numerically [12,13,14]. official website and that any information you provide is encrypted This allows for greater force and higher performance overall. It is a high voltage circuit board, specifically designed for the piezoelectric micro pumps. Miniaturized PMMA ball-valve micropump with cylindrical electromagnetic actuator. For the applied voltage of 400 V, attack angle of 45, and width of the valves 6 m, the flow rates are 0.6, 6.9, and 16.6 L/min, when the piezoelectric lengths are 2, 4, and 5 mm, respectively. For instance, when the length of the valve is 120 m and the attack angle changes from 30 to 75, the obtained optimum width remains as approximately 4 m for all the cases. Nagoya, Aichi 458-8522, Japan The longer piezoelectric actuator results in bigger displacement and flow area, which results in larger flow rates. In order to perform an accurate simulation, the mesh elements around the valves are finer. In other words, in this case, the right-side valve should be open to enable fluid to flow outwards, and the inlet valve should be closed to prevent the fluid flow at the left-side to the inlet. But what exactly is a piezoelectric micropump, and how does it work? Another well-known mechanical micro-pump is a piezoelectric micro-pump. According to the operation mechanism, micro-pumps are categorized in two branches: mechanical and non-mechanical micro-pumps. This optimum width is not dependent on the flow rate. (a) Downward motion (b) Upward motion. The charge conservation equations are given as: here, is the electrical field, V is the applied voltage, v is the charge density, and D is the electrical permittivity of the material. These designs change from one application to another based on the requirements and working conditions [5]. Variation of the obtained flow rate with the valve width (w): (a) for three valve lengths (hp) (Lp = 5mm, V = 400 V); (b) for three applied voltages (V) (Lp = 5mm, hp = 130 m). As a result, a tensile stress and bending moment at the piezo and piezo-glass double layer are exerted, which move the pump membrane to the downward direction. e11E is the elastic stiffness (Youngs modulus) at constant electric field, while 33s is the electric permittivity under the constant strain condition, and e31 is the piezoelectric constant. Nevertheless, the outlet valve bends in such a way that it blocks the flow at the outlet, due to the fluid momentum. Figure 3 shows the simulated domain. Before Accoto D., Nedelcu O., Carrozza M., Dario P. Theoretical analysis and experimental testing of a miniature piezoelectric pump; Proceedings of the MHA98 1998 International Symposium on Micromechatronics and Human Science.-Creation of New Industry-(Cat. A biomimetic piezoelectric pump: Computational and experimental characterization. Whatever their application, a piezoelectric micropumpdrives fluid transfer in a highly-precise, noninvasive manner. Van Lintel H., Van de Pol F., Bouwstra S. A piezoelectric micropump based on micromachining of silicon. In an innovative manner, the magnetic actuation of ferrofluids was also used in micro-pumping by taking the advantage of dynamic magnetic fields [7,8]. Some diagnostic medical applicationsthat employ piezo micropumps include: Their low power consumption also makes them an ideal choice for portable medical devices, as the pump's energy requirements are unlikely to drain batteries any time soon. Ashraf M.W., Tayyaba S., Afzulpurkar N. Micro electromechanical systems (MEMS) based microfluidic devices for biomedical applications. Although mechanically actuated valves are commonly used in macro-scale reciprocating pumps, they are not widespread in micro-pumps because of their complicated fabrication process. Comparison between experimental [30] and numerical results for the validation of the model. The operation of valve blocking when the piezoelectric component moves downwards (Lp = 5 mm, w = 5 m, hp = 130 m, V = 400 V). Olsson A., Stemme G., Stemme E. A valve-less planar fluid pump with two pump chambers. Characterized by their relatively low flow rates and often laminar flow, micropumps are any class of pump that transfers a small fluid volume across a space. The implementation of the MEMS technology gives rise to generate high-efficiency microfluidic tools for satisfying the needs in the biomedical industry. The main advantages of piezoelectric micro-pumps include low noise [18] and energy consumption [19]. The applied 2-D modeling approach enables us to evaluate the effect of these design parameters and operating conditions. Our numerical results show that the optimum attack angle can be predicted from the known width and length of the valve. As seen in the figure, the efficiency of the piezoelectric pump increases as the length of the valve increases. No. For the corresponding operation condition, as the length of the valve increases, its performance to block the fluid at the right-side improves. A larger voltage difference results in larger flow rates since bigger displacement at the interface of the fluid and the piezoelectric material can be achieved when applying higher voltages. Figure 12 shows the effect of the applied voltage. The elastic behavior is taken into account in Equations (3)(8). Federal government websites often end in .gov or .mil. It is user-friendly with a front panel digital display for configuring the output voltage and output frequency, and a memory function to store the most recently used settings. The diffuser angle must be carefully analyzed as well. As indicated in the results, the maximum flow rate of the micro-pump depends on the design of its components and operation conditions. Takasago Electric, Inc. All Rights Reserved. [30] experimentally studied the effect of the applied frequency to the piezoelectric component. According to the obtained results, as the length of the working valves increases, the provided flow rate becomes larger. Micro Pumps for Infusion/Drug Delivery Systems, Reagent-Prefillable Disposable Fluidic System, Manually Adjustable Low Pulsation Micro Pump Unit, Micro Pumps for Infusion/Drug Delivery System, TYGON 2001 (for use with methanol, water, and most general uses), TYGON 2375 (for use with methanol, water, and most general substances).

Numerical Investigation of the Secondary Flow Effect of Lateral Structure of Micromixing Channel on Laminar Flow. Moreover, it is worthwhile to state that ALE (Arbitrary Lagrangian and Eulerian) moving mesh is applied to the fluid domain to track the displacement of the valves. Oates W.S., Lynch C.S. You'll find them in industries ranging from the drug delivery sector to the alternative fuels market. The other major parameter is the length of the piezo component. Figure 2 shows the domain of a piezoelectrically driven pump. ; writing (original draft preparation), A.A. and V.E.A. Since the velocity of the fluid is small, the fluid flow is assumed to be laminar. In this study, the effects of major parameters on the performance of a piezoelectric actuated pump are investigated. Fully downward and upward motion of the pump membrane. As a result, the trapped water inside the channel can leave the channel from the outlet valve. As the width of the valves increases, its tendency for bending decreases. Next, they must ensure that each transfer rate flows exactly at the velocity dictated by the reaction kinetics so that electrical generation will occur. This section presents the behavior of a passive-valve piezoelectric micro-pump during the operation under different conditions.

First, they must deliver the air and the fuel to their respective electrodes so that the reactions may occur. Additionally, the effects of various parameters including the length, width, and attack angle of the valves, piezoelectric length, and applied voltage on the piezoelectric device are displayed. Moreover, for all the cases, the sensitivity analysis shows that the changes in the attack angle do not lead to a dramatic change in the flow rate around the optimum value. The other parameter is the width of the valve. The optimum valve width corresponds to approximately the same value for all the voltages. Design optimization of an electromagnetic actuation based valveless micropump for drug delivery application. [27] integrated electromagnetic actuation (2W) and reciprocating PMMA ball valve to characterize the fabricated micro-pump. The piezoelectric micro pump is a miniature, slim and lightweight diaphragm micro pump, which enables continuous micro fluid delivery. Experimental analysis of a valve-less piezoelectric micropump with crescent-shaped structure. TEL +81 52 891 2301 Thereafter, Esashi et al. From high-powered electronics to the fuel delivery systems that will power our future to lifesaving biomedical applications, our piezo drivers can take your fluid transfer project to the next level. After switching the voltage off, the pump membrane moves upwards resulting in a decrease in pressure. However, at the same time, the right-side valve should be closed to confine the reverse flow from the outlet. To avoid computational costs, all the results of the parametric study are provided from 2-D numerical modeling. That makes them useful in several industries and more uses are likely on the horizon. As in the fluid domain, due to small size of the valves, the effect of gravity is neglected: where ds is the displacement of solid, F is the applied external force, which is the result of the drag forces, fb is the resulting forces in the body, and s is the density of the solid. Considering that these assumptions lead to a higher flow rate than the experimental data, this deviation could be due to the increase in the energy loss at the interface, when the applied frequency increases. For example, electrostatic and electroactive polymer composite micro-pumps depend on the Columbic attraction of two oppositely charged bodies to induce displacement or exert a force [10].

government site. The governing equations include the Gausss law and elastic behavior of material. PMC legacy view In other words, when the piezoelectric component moves upwards, the longer valve blocks more water at the left-side compared to the shorter valve. Farshchi Yazdi S.A.F., Corigliano A., Ardito R. 3-D design and simulation of a piezoelectric micropump. ), 2Sabanci University Nanotechnology and Applications Center (SUNUM), Sabanci University, Tuzla, Istanbul 34956, Turkey, 3Center of Excellence for Functional Surfaces and Interfaces for Nano-Diagnostics (EFSUN), Sabanci University, Istanbul 34956, Turkey. From naturally occurring minerals like topaz and quartz to artificial metals and ceramics, there is a special class of materials that generate electricity upon mechanical deformation. One of its most common applications is micropumps in specialized fluid transfer. Piezoelectrical micropumps can be found in some residential applications as well. Generally, piezoelectric actuators do not require any high voltage to operate. In this case, the corresponding maximum stress is 31.68 kPa for the attack angle of the valve of 75, applied voltage of 400 V, width and length of the valve of 4 and 140 m, respectively, and the length of the piezoelectric component of 5 mm. HHS Vulnerability Disclosure, Help The governing equations should include fluid flow, elastic behavior of solids, and piezoelectric effect of the material. Zengerle R., Ulrich J., Kluge S., Richter M., Richter A. Su Y.-F., Chen W.-Y., Cui F., Zhang W.-P. Design and fabrication process of electromagnetically actuated valveless micropump with two parallel flexible diaphragms. An official website of the United States government. Learn more The case with 14,530 cells provides a reasonable computation time and results since there is only a 2.4% difference in flow rate between the selected and finest mesh configurations. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (. The micro-pump fabricated by Schabmueller et al. The attack angle of the valves plays a very crucial role in the efficiency of the pump. The mentioned trend is the same for all the cases and is independent of the attack angle and width of the valve, and operation voltage. Sato T., Yamanishi Y., Cacucciolo V., Kuwajima Y., Shigemune H., Cianchetti M., Laschi C., Maeda S. Electrohydrodynamic conduction pump with asymmetrical electrode structures in the microchannels. The boundary conditions are summarized as: Moreover, the properties of the water are obtained from the COMSOL Library.

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